Detail publikace

Two axis micropositioning system with piezoelectric actuators and digital control

MIKEL, B., ČÍP, O., HARNA, Z.

Originální název

Two axis micropositioning system with piezoelectric actuators and digital control

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.

Klíčová slova

Micropositioning, PID controller, interferometry measurements.

Autoři

MIKEL, B., ČÍP, O., HARNA, Z.

Vydáno

1. 1. 2001

Nakladatel

SPIE

Místo

USA

ISBN

0-8194-4047-7

Kniha

12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics

Číslo edice

1

Strany od

333

Strany do

338

Strany počet

6

BibTex

@{BUT69725
}