Detail publikace

Thermal desorption spectroscopy of hydrogen from a-Si:H

SCHAUER, F., SALYK, O.

Originální název

Thermal desorption spectroscopy of hydrogen from a-Si:H

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The thermal desorption spectroscopy is a modern analytical method for organic substances, but it can be used in special cases for anorganic analysis, e.g. for hydrogen asses in amorphous hydrogenated silicon. It helps to evaluate the concentration of gas elements or substances in bulk solids or thin solid films, their bonding energy and structure of crystalline or amorphous network. This method was utilised for the amorphous hydrogenated silicon analysis

Klíčová slova v angličtině

amorphous hydrohenated silicon, hydrogen, concentration, desorption

Autoři

SCHAUER, F., SALYK, O.

Vydáno

1. 7. 1993

Místo

Liptovský MIkuláš

Strany od

51

BibTex

@inproceedings{BUT6391,
  author="František {Schauer} and Ota {Salyk}",
  title="Thermal desorption spectroscopy of hydrogen from a-Si:H",
  booktitle="Conference Thin Films",
  year="1993",
  address="Liptovský MIkuláš"
}