Detail publikace

New method for the complete analysis of thin films non-uniform in optical parameters

OHLÍDAL, M., OHLÍDAL, I., FRANTA, D., ČUDEK, V.

Originální název

New method for the complete analysis of thin films non-uniform in optical parameters

Typ

abstrakt

Jazyk

angličtina

Originální abstrakt

New method enabling us to perform the complete optical analysis of non-absorbing and weakly absorbing thin films non-uniform in thickness and optical constants is presented. This method is based on interpreting the spectral dependences of the reflectance measured for a sufficient number of points forming a matrix in the mean planes of the boundaries of the film analyzed.

Klíčová slova v angličtině

Thin films, spectral reflectance

Autoři

OHLÍDAL, M., OHLÍDAL, I., FRANTA, D., ČUDEK, V.

Vydáno

1. 10. 2002

Nakladatel

The University of Tokyo, JApan

Místo

Tokyo

Strany od

181

Strany do

181

Strany počet

1

BibTex

@misc{BUT60151,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Daniel {Franta} and Vladimír {Čudek}",
  title="New method for the complete analysis of thin films non-uniform in optical parameters",
  booktitle="Asia-Pacific Surface & Interface Analysis Conference",
  year="2002",
  pages="1",
  publisher="The University of Tokyo, JApan",
  address="Tokyo",
  note="abstract"
}