Detail publikace

An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions - etching versus polymerization

ŠIKOLA, T., ARMOUR, D., VAN DEN BERG, J.

Originální název

An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions - etching versus polymerization

Typ

kapitola v knize

Jazyk

angličtina

Autoři

ŠIKOLA, T., ARMOUR, D., VAN DEN BERG, J.

Rok RIV

1994

Vydáno

1. 1. 1994

Nakladatel

Institut für Ionenphysik, Universität Innsbruck

Místo

Hintermoos/Maria Alm, Univ. Innsbruck,

Strany od

322

Strany do

328

Strany počet

7

BibTex

@inbook{BUT51967,
  author="Tomáš {Šikola} and Dave {Armour} and Jaap {Van den berg}",
  title="An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions - etching versus polymerization",
  booktitle="SASP 94 - Symposium on atomic, cluster and surface physics",
  year="1994",
  publisher="Institut für Ionenphysik, Universität Innsbruck",
  address="Hintermoos/Maria Alm, Univ.  Innsbruck,",
  pages="7",
  isbn="0"
}