Detail publikace

Influence of technological conditions on mechanical stresses inside diamond-like carbon films

OHLÍDAL, I., OHLÍDAL, M., FRANTA, D.

Originální název

Influence of technological conditions on mechanical stresses inside diamond-like carbon films

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The influences of the technological conditions on the values of the intrinsic mechanical stresses inside DLC thin films prepared by PECVD method onto silicon subtrates are studied. These stresses are measured by two-beam interferometry and optical profilometry based on chromatic aberration through the neasurements of deformations of the silicon substrates originating in consequence of the film stresses. It is shown that the influence of the deposition time (i.e film thickness) on the film stress is relatively slight in contrast to the influence of the hydrogen flow rate on this quantity. It is namely shown that the film stresses are influenced by the hydrogen flow rate values in a pronounced way within the the interval 1-7 sccm. Moreover, it is shown that the method of optical profilometry used can be competitive to the method of two-beam interferometry from the practical point of view.

Klíčová slova

Mechanical stress, DLC, Optical methods

Autoři

OHLÍDAL, I., OHLÍDAL, M., FRANTA, D.

Rok RIV

2005

Vydáno

1. 11. 2005

Nakladatel

ELSEVIER SCIENCE SA

Místo

LAUSANNE, SWITZERLAND

ISSN

0925-9635

Periodikum

Diamond and Related Materials

Ročník

14

Číslo

11-12

Stát

Nizozemsko

Strany od

1835

Strany do

1838

Strany počet

4

BibTex

@article{BUT45891,
  author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Daniel {Franta} and Vladimír {Čudek} and Vilma {Buršíková} and Petr {Klapetek} and Kateřina {Brillová}",
  title="Influence of technological conditions on mechanical stresses inside diamond-like carbon films",
  journal="Diamond and Related Materials",
  year="2005",
  volume="14",
  number="11-12",
  pages="1835--1838",
  issn="0925-9635"
}