Detail publikace

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

Originální název

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

Anglický název

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

Jazyk

en

Originální abstrakt

Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio of flow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of films was investigated.

Anglický abstrakt

Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio of flow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of films was investigated.

BibTex


@article{BUT40867,
  author="Jan {Gregor} and Ivana {Jakubová} and Josef {Šenk} and Milan {Hrabovský} and Blahoslav {Kolman} and Miloš {Konrád} and Vladimír {Kopecký} and V. {Vorlíček} and J. {Pokorný}",
  title="Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure",
  annote="Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio of flow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of films was investigated.",
  chapter="40867",
  journal="Czechoslovak Journal of Physics",
  number="suppl. D",
  volume="52",
  year="2002",
  month="june",
  pages="878",
  type="journal article"
}