Detail publikace

Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization

SKALSKÝ, M. FIALKA, J. HAVRÁNEK, Z.

Originální název

Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

An accurate characterization of piezoelectric films is essential for their usage in various types of MEMS sensors and actuators. This paper presents a novel scanning double-beam laser interferometer (DBLI) to measure the thickness piezoelectric coefficient with a high accuracy. Compared to previous DBLI solutions, we employ a closed-loop phase shift compensation via an electro-optical modulator to stabilize the random phase drift as well as to compensate the harmonic sample-induced phase shift. As a consequence, the setup robustness is enhanced and the measured displacement is no more sensitive to sample reflectivity or source and detector signal gains, which allows to use the DBLI as scanning.

Klíčová slova

laser scanning interferometry, double-beam, phase compensation

Autoři

SKALSKÝ, M.; FIALKA, J.; HAVRÁNEK, Z.

Vydáno

20. 5. 2019

Nakladatel

IEEE

Místo

Piscataway; USA

ISBN

978-1-5386-3460-8

Kniha

2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2019) Proceedings

Edice

CFP19IMT-ART

Strany od

466

Strany do

471

Strany počet

6

URL

https://ieeexplore.ieee.org/abstract/document/8826963

BibTex

@inproceedings{BUT158395,
  author="Michal {Skalský} and Jiří {Fialka} and Zdeněk {Havránek}",
  title="Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization",
  booktitle="2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2019) Proceedings",
  year="2019",
  series="CFP19IMT-ART",
  pages="466--471",
  publisher="IEEE",
  address="Piscataway; USA",
  doi="10.1109/I2MTC.2019.8826963",
  isbn="978-1-5386-3460-8",
  url="https://ieeexplore.ieee.org/abstract/document/8826963"
}