Detail publikace

Analysis of the Gas Flow in the Specimen Chamber of the Environmental Scanning Electron Microscope

BÍLEK, M. HLAVATÁ, P. VYROUBAL, P.

Originální název

Analysis of the Gas Flow in the Specimen Chamber of the Environmental Scanning Electron Microscope

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The article describes the analysis of the specimen chamber in environmental scanning electron microscope AQUASEM II. It was designed six concepts of specimen chamber surrounding the sample holder. The concepts differ in the shape of the sample holder and the entry into the differentially pumped chamber. The purpose was to optimize the area surrounding the sample for minimizing of the speed of the gas flow in nearest surrounding of the sample for reducing of the speed of the sample drying

Klíčová slova

ANSYS, EREM, AQUASEM II

Autoři

BÍLEK, M.; HLAVATÁ, P.; VYROUBAL, P.

Vydáno

7. 12. 2016

ISBN

978-80-214-5109-4

Kniha

ECS Transactions

ISSN

1938-5862

Periodikum

ECS Transactions

Stát

Spojené státy americké

Strany od

267

Strany do

273

Strany počet

6

BibTex

@inproceedings{BUT129482,
  author="Michal {Bílek} and Pavla {Šabacká} and Petr {Vyroubal}",
  title="Analysis of the Gas Flow in the Specimen Chamber of the Environmental Scanning Electron Microscope",
  booktitle="ECS Transactions",
  year="2016",
  journal="ECS Transactions",
  pages="267--273",
  doi="10.1149/07401.0267ecst",
  isbn="978-80-214-5109-4",
  issn="1938-5862"
}