Detail publikace

Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry

NEČAS, D. ČUDEK, V. VODÁK, J. OHLÍDAL, M. KLAPETEK, P. ZAJÍČKOVÁ, L.

Originální název

Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The construction of a normal-incidence imaging spectrophotometer for mapping of thin film properties is described. It is based on an on-axis reflective imaging system, utilising a telescope-like arrangement. A charge-coupled device camera is used as the detector, permitting measurements in the spectral range of 275-1100 nm with resolution of 37 square micrometers. The performance of the instrument is demonstrated by optical characterisation of highly non-uniform thin films deposited from hexamethyldisiloxane on silicon substrates by a single capillary plasma jet at atmospheric pressure. The imaging spectrophotometry is used as a self-sufficient technique for the determination of both the film optical constants and maps of local thickness. The thickness maps are compared with the results of conventional thickness profile characterisation methods, profilometry and atomic force microscopy and the differences and errors are discussed.

Klíčová slova

imaging spectrophotometry; micro-plasma jet; non-uniform thin films; optical properties; thickness mapping

Autoři

NEČAS, D.; ČUDEK, V.; VODÁK, J.; OHLÍDAL, M.; KLAPETEK, P.; ZAJÍČKOVÁ, L.

Rok RIV

2014

Vydáno

13. 10. 2014

Nakladatel

IOP PUBLISHING LTD

Místo

TEMPLE CIRCUS, TEMPLE WAY, BRISTOL BS1 6BE, ENGLAND

ISSN

0957-0233

Periodikum

Measurement Science and Technology

Ročník

25

Číslo

11

Stát

Spojené království Velké Británie a Severního Irska

Strany od

1

Strany do

9

Strany počet

9

BibTex

@article{BUT109014,
  author="David {Nečas} and Vladimír {Čudek} and Jiří {Vodák} and Miloslav {Ohlídal} and Petr {Klapetek} and Lenka {Zajíčková}",
  title="Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry",
  journal="Measurement Science and Technology",
  year="2014",
  volume="25",
  number="11",
  pages="1--9",
  doi="10.1088/0957-0233/25/11/115201",
  issn="0957-0233"
}