Detail publikace

Optimizing Thermal Evaporation Process Compared to Magnetron Sputtering for Fabrication of Titania Quantum Dots

SVATOŠ, V. DRBOHLAVOVÁ, J. MÁRIK, M. PEKÁREK, J. CHOMOUCKÁ, J. HUBÁLEK, J.

Originální název

Optimizing Thermal Evaporation Process Compared to Magnetron Sputtering for Fabrication of Titania Quantum Dots

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The titania quantum dots (QDs) are fabricated using template based non-lithographic technique. This technique is comparing to the other known methods (such as e-beam or droplet epitaxy, and lithography), cheaper, faster, and well reproducible. Nanoporous template employed in this method is created from aluminum layer. The material in the following step for creating QDs is titanium film located under the aluminum film. These films are prepared using physical vapor deposition (PVD) processes. Electrochemical properties and behavioral of these layers are key parameters for fabrication of QDs. During PVD deposition, it is very important to optimize every parameter of deposition process due to following creation of QDs. In the presented paper the comparison of two deposition methods is proposed and the deposition parameters influence on the nanofabrication of QDs is shown. In the beginning, there is the optimization of the thermal evaporation. The PVD thermal evaporation process is used due the ability of stress reducing, purity of materials, and grain structure growing. The optimizing of the evaporation is very important because of a few techniques and improvements (e.g. the substrate heating) are not allowed to be employed in order to reach the optimal titanium and aluminum layers. The PVD magnetron sputtering is one of the most applied methods for thin film deposition. In this paper, there is a discussion of nanofabrication results, namely characterization of final QDs fabricated in the process of anodization using Ti/Al bilayer deposited via the optimized thermal evaporation and the magnetron sputtering.

Klíčová slova

titania quantum dots, anodization, magnetron sputtering, thermal evaporation.

Autoři

SVATOŠ, V.; DRBOHLAVOVÁ, J.; MÁRIK, M.; PEKÁREK, J.; CHOMOUCKÁ, J.; HUBÁLEK, J.

Vydáno

16. 10. 2013

Nakladatel

Tanger, Ltd.

Místo

Ostrava

ISBN

978-80-87294-47-5

Kniha

Conference Proceedings 5th International Conference NANOCON 2013

Edice

1

Číslo edice

1

ISSN

NEUVEDENO

Strany od

192

Strany do

196

Strany počet

6

BibTex

@inproceedings{BUT102877,
  author="Vojtěch {Svatoš} and Jana {Drbohlavová} and Marian {Márik} and Jan {Pekárek} and Jana {Pekárková} and Jaromír {Hubálek}",
  title="Optimizing Thermal Evaporation Process Compared to Magnetron Sputtering for Fabrication of Titania Quantum Dots",
  booktitle="Conference Proceedings 5th International Conference NANOCON 2013",
  year="2013",
  series="1",
  number="1",
  pages="192--196",
  publisher="Tanger, Ltd.",
  address="Ostrava",
  isbn="978-80-87294-47-5"
}