Detail publikace

Design and fabrication of MEMS low power heating membrane

Originální název

Design and fabrication of MEMS low power heating membrane

Anglický název

Design and fabrication of MEMS low power heating membrane

Jazyk

en

Originální abstrakt

The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.

Anglický abstrakt

The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.

BibTex


@inproceedings{BUT92581,
  author="Vojtěch {Svatoš} and Marian {Márik} and Jan {Pekárek} and Radim {Hrdý} and Jana {Pekárková} and Jaromír {Hubálek}",
  title="Design and fabrication of MEMS low power heating membrane",
  annote="The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.",
  address="Mendelova univerzita v Brně",
  booktitle="XII. Pracovní setkání fyzikálních chemiků a elektrochemiků",
  chapter="92581",
  howpublished="print",
  institution="Mendelova univerzita v Brně",
  year="2012",
  month="may",
  pages="303--304",
  publisher="Mendelova univerzita v Brně",
  type="conference paper"
}