Detail publikace

Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films

Originální název

Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films

Anglický název

Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films

Jazyk

en

Originální abstrakt

The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane.

Anglický abstrakt

The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane.

BibTex


@inproceedings{BUT8829,
  author="Zuzana {Rašková} and Hana {Šormová} and Iveta {Havelková} and František {Krčma} and Jan {Vaněk} and Radek {Přikryl} and Vladimír {Čech}",
  title="Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films",
  annote="The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios.  The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane.",
  address="IUPAC",
  booktitle="Proceedings of ISPC XVI",
  chapter="8829",
  institution="IUPAC",
  year="2003",
  month="june",
  pages="1",
  publisher="IUPAC",
  type="conference paper"
}