Detail publikace

Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure

NEDĚLA, V.

Originální název

Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.

Klíčová slova

ESEM,DIFFERENTIAL PUMPING CHAMBER, ADAPTATION

Autoři

NEDĚLA, V.

Vydáno

1. 1. 2003

Místo

Brno

ISBN

80-214-2401-X

Kniha

Proceedings of the International Conference and Competition Student EEICT 2003

Strany od

199

Strany do

203

Strany počet

5

URL

VUT Brno

BibTex

@inproceedings{BUT7908,
  author="Vilém {Neděla}",
  title="Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure",
  booktitle="Proceedings of the International Conference and Competition Student EEICT 2003",
  year="2003",
  pages="5",
  address="Brno",
  isbn="80-214-2401-X",
  url="VUT Brno"
}