Detail publikace

Pressure Sensor with Si3N4 Diaphragm and Optoelectronic Sensing

Originální název

Pressure Sensor with Si3N4 Diaphragm and Optoelectronic Sensing

Anglický název

Pressure Sensor with Si3N4 Diaphragm and Optoelectronic Sensing

Jazyk

en

Originální abstrakt

Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark’s position is sensed using position sensing device – fotolateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.

Anglický abstrakt

Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark’s position is sensed using position sensing device – fotolateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.

BibTex


@inproceedings{BUT6231,
  author="Petr {Beneš} and František {Matějka} and Radimír {Vrba} and Vladimír {Kolařík}",
  title="Pressure Sensor with Si3N4 Diaphragm and Optoelectronic Sensing",
  annote="Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark’s position is sensed using position sensing device – fotolateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.",
  address="Instituto de Telecomunicacoes",
  booktitle="TEMI 2001 trends in electrical Measurement and Instrumentation",
  chapter="6231",
  institution="Instituto de Telecomunicacoes",
  year="2001",
  month="september",
  pages="327",
  publisher="Instituto de Telecomunicacoes",
  type="conference paper"
}