Detail publikace

Experimental study of MEMS capacitive sensor

Originální název

Experimental study of MEMS capacitive sensor

Anglický název

Experimental study of MEMS capacitive sensor

Jazyk

en

Originální abstrakt

This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.

Anglický abstrakt

This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.

BibTex


@inproceedings{BUT31908,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek} and Martin {Magát}",
  title="Experimental study of MEMS capacitive sensor",
  annote="This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.",
  address="Vysoké učení technické v Brně, Antonínská 548/1",
  booktitle="EDS'09 IMAPS CS International Conference Proceedings",
  chapter="31908",
  howpublished="print",
  institution="Vysoké učení technické v Brně, Antonínská 548/1",
  year="2009",
  month="september",
  pages="205--209",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  type="conference paper"
}