Detail publikace

Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure

Originální název

Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure

Anglický název

Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure

Jazyk

en

Originální abstrakt

Carbon nanotubes are new material with unique electrical and mechanical properties. Most of these properties of carbon nanotubes depend on their diameters and chiralities. The depositions were carried out on silicon single crystal (Si) wafer of the orientation <100> doped by phosphorus. Substrates were coated with a thin iron catalytic layer which was vacuum-evaporated to a thickness in the range of 10 nm into the size of 5x5 mm2. Using methane as carbon resource, hydrogen as carrier, carbon nanotubes were synthesized by microwave plasma enhanced chemical vapor deposition (PECVD) at atmospheric pressure. Samples were analyzed by scanning electron microscopy (SEM).

Anglický abstrakt

Carbon nanotubes are new material with unique electrical and mechanical properties. Most of these properties of carbon nanotubes depend on their diameters and chiralities. The depositions were carried out on silicon single crystal (Si) wafer of the orientation <100> doped by phosphorus. Substrates were coated with a thin iron catalytic layer which was vacuum-evaporated to a thickness in the range of 10 nm into the size of 5x5 mm2. Using methane as carbon resource, hydrogen as carrier, carbon nanotubes were synthesized by microwave plasma enhanced chemical vapor deposition (PECVD) at atmospheric pressure. Samples were analyzed by scanning electron microscopy (SEM).

Dokumenty

BibTex


@inproceedings{BUT31418,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek}",
  title="Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure",
  annote="Carbon nanotubes are new material with unique electrical and mechanical properties. Most of these properties of carbon nanotubes depend on their diameters and chiralities. The depositions were carried out on silicon single crystal (Si) wafer of the orientation <100> doped by phosphorus. Substrates were coated with a thin iron catalytic layer which was vacuum-evaporated to a thickness in the range of 10 nm into the size of 5x5 mm2. Using methane as carbon resource, hydrogen as carrier, carbon nanotubes were synthesized by microwave plasma enhanced chemical vapor deposition (PECVD) at atmospheric pressure. Samples were analyzed by scanning electron microscopy (SEM).",
  address="Ing. Zdeněk Novotný, CSc.",
  booktitle="Electronic Devices and Systems EDS'08 IMAPS CS International Conference 2008",
  chapter="31418",
  howpublished="print",
  institution="Ing. Zdeněk Novotný, CSc.",
  year="2008",
  month="september",
  pages="566--569",
  publisher="Ing. Zdeněk Novotný, CSc.",
  type="conference paper"
}