Detail publikace

Carbon nanotubes in pressure sensors

FICEK, R. VRBA, R. JAŠEK, O. ELIÁŠ, M. ZAJÍČKOVÁ, L.

Originální název

Carbon nanotubes in pressure sensors

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

In this paper a new research and development of the pressure sensors utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors consisted of the two parts; elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

Klíčová slova

carbon nanotubes, field emission, pressure sensor

Autoři

FICEK, R.; VRBA, R.; JAŠEK, O.; ELIÁŠ, M.; ZAJÍČKOVÁ, L.

Rok RIV

2007

Vydáno

20. 9. 2007

Nakladatel

Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105

Místo

Brno

ISBN

978-80-214-3470-7

Kniha

EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING

Číslo edice

první

Strany od

178

Strany do

182

Strany počet

5

BibTex

@inproceedings{BUT27858,
  author="Richard {Ficek} and Radimír {Vrba} and Ondřej {Jašek} and Marek {Eliáš} and Lenka {Zajíčková}",
  title="Carbon nanotubes in pressure sensors",
  booktitle="EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING",
  year="2007",
  number="první",
  pages="178--182",
  publisher="Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105",
  address="Brno",
  isbn="978-80-214-3470-7"
}