Detail publikace

Carbon nanotubes in pressure sensors

Originální název

Carbon nanotubes in pressure sensors

Anglický název

Carbon nanotubes in pressure sensors

Jazyk

en

Originální abstrakt

In this paper a new research and development of the pressure sensors utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors consisted of the two parts; elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

Anglický abstrakt

In this paper a new research and development of the pressure sensors utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors consisted of the two parts; elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

Dokumenty

BibTex


@inproceedings{BUT27858,
  author="Richard {Ficek} and Radimír {Vrba} and Ondřej {Jašek} and Marek {Eliáš} and Lenka {Zajíčková}",
  title="Carbon nanotubes in pressure sensors",
  annote="In this paper a new research and development of the pressure sensors utilizing carbon
nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface
increase element in capacitance sensor are presented. Both sensors consisted of the
two parts; elastic electrode-sensing film fabricated by wet anisotropic etching
process and solid electrode. The emission sensor has elastic anode electrode with
membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the
vacuum chamber. The capacitance sensor has the same topology extensive by CNT
on both electrodes without vacuum chamber. The MWCNTs were grown by plasma
enhanced chemical vapour deposition (PECVD).",
  address="Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105",
  booktitle="EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING",
  chapter="27858",
  institution="Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105",
  year="2007",
  month="september",
  pages="178--182",
  publisher="Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105",
  type="conference paper"
}