Detail publikace

Carbon Nanotubes Applicated in Pressure Measurement

Originální název

Carbon Nanotubes Applicated in Pressure Measurement

Anglický název

Carbon Nanotubes Applicated in Pressure Measurement

Jazyk

en

Originální abstrakt

Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

Anglický abstrakt

Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

BibTex


@inproceedings{BUT23640,
  author="Richard {Ficek} and Radimír {Vrba}",
  title="Carbon Nanotubes Applicated in Pressure Measurement",
  annote="Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as
the electron source in emission sensor or as the surface increase element in capacitance
sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet
anisotropic etching process and solid electrode. The emission sensor has elastic anode
electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in
the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on
both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced
chemical vapour deposition (PECVD).",
  address="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií",
  booktitle="Proceedings of the 13th Conference STUDENT EEICT 2007",
  chapter="23640",
  institution="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií",
  year="2007",
  month="april",
  pages="295",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií",
  type="conference paper"
}