Detail publikace

Tips chip measuring unit

Originální název

Tips chip measuring unit

Anglický název

Tips chip measuring unit

Jazyk

en

Originální abstrakt

This article describes design and construction of the measuring part of the tip chip measuring unit, which was made out to ensure measurement of the tested chip parameters. It offers possibility to measuring on whole wafer by chip by chip method. The measuring unit consists of the 2D work-bench and eight apexes with autonomous 3D positioning system. The measuring part consists of few blocks – Current measuring, Resistance measuring and Capacity measuring.

Anglický abstrakt

This article describes design and construction of the measuring part of the tip chip measuring unit, which was made out to ensure measurement of the tested chip parameters. It offers possibility to measuring on whole wafer by chip by chip method. The measuring unit consists of the 2D work-bench and eight apexes with autonomous 3D positioning system. The measuring part consists of few blocks – Current measuring, Resistance measuring and Capacity measuring.

Dokumenty

BibTex


@inproceedings{BUT18812,
  author="Michal {Pavlík} and Martin {Magát} and Radimír {Vrba}",
  title="Tips chip measuring unit",
  annote="This article describes design and construction of the measuring part of the tip chip measuring unit, which was made out to ensure measurement of the tested chip parameters. It offers possibility to measuring on whole wafer by chip by chip method. The measuring unit consists of the 2D work-bench and eight apexes with autonomous 3D positioning system. The measuring part consists of few blocks – Current measuring, Resistance measuring and Capacity measuring.",
  address="Vysoké učení technické v Brně, Antonínská 548/1",
  booktitle="EDS '06 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS",
  chapter="18812",
  institution="Vysoké učení technické v Brně, Antonínská 548/1",
  year="2006",
  month="september",
  pages="254",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  type="conference paper"
}