Detail publikace

Techniques for Characterization of Integrated Nonlinear Capacitors

Originální název

Techniques for Characterization of Integrated Nonlinear Capacitors

Anglický název

Techniques for Characterization of Integrated Nonlinear Capacitors

Jazyk

en

Originální abstrakt

The paper deals with techniques for capacitance characterization of integrated nonlinear capacitors on a chip. Several methods are compared, main part is about CBCM method (Charge-Based Capacitance Measurements) and it's application to the nonlinear capacitance characterization. Since its invention the CBCM method has been extensively used for on-chip interconnect linear capacitance measurements. However, it can be also used for nonlinear device characterization. Application of CBCM to CMOS gate-capacitance measurements is presented.

Anglický abstrakt

The paper deals with techniques for capacitance characterization of integrated nonlinear capacitors on a chip. Several methods are compared, main part is about CBCM method (Charge-Based Capacitance Measurements) and it's application to the nonlinear capacitance characterization. Since its invention the CBCM method has been extensively used for on-chip interconnect linear capacitance measurements. However, it can be also used for nonlinear device characterization. Application of CBCM to CMOS gate-capacitance measurements is presented.

BibTex


@inproceedings{BUT14756,
  author="Tomáš {Sutorý}",
  title="Techniques for Characterization of Integrated Nonlinear Capacitors",
  annote="The paper deals with techniques for capacitance characterization of integrated nonlinear capacitors on a chip. Several methods are compared, main part is about CBCM method (Charge-Based Capacitance Measurements) and it's application to the nonlinear capacitance characterization. Since its invention the CBCM method has been extensively used for on-chip interconnect linear capacitance measurements. However, it can be also used for nonlinear device characterization. Application of CBCM to CMOS gate-capacitance measurements is presented.",
  address="Ing. Zdeněk Novotný CSc., Ondráčkova 105, Brno",
  booktitle="Proceedings of the 11th conference Student EEICT 2005 Volume 2",
  chapter="14756",
  institution="Ing. Zdeněk Novotný CSc., Ondráčkova 105, Brno",
  year="2005",
  month="april",
  pages="322",
  publisher="Ing. Zdeněk Novotný CSc., Ondráčkova 105, Brno",
  type="conference paper"
}