Detail publikace

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Originální název

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Anglický název

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Jazyk

en

Originální abstrakt

The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NNM-1. The aim of this work is to determine accuracy of measurements on this machine.

Anglický abstrakt

The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NNM-1. The aim of this work is to determine accuracy of measurements on this machine.

Dokumenty

BibTex


@article{BUT131340,
  author="Jan {Šrámek} and Róbert {Jankových}",
  title="ACCURACY OF MEASUREMENT IN NANOMETROLOGY",
  annote="The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NNM-1. The aim of this work is to determine accuracy of measurements on this machine.",
  address="MM Science Journal",
  chapter="131340",
  doi="10.17973/MMSJ.2016_12_2016203",
  howpublished="online",
  institution="MM Science Journal",
  number="6",
  volume="2016",
  year="2016",
  month="november",
  pages="1643--1647",
  publisher="MM Science Journal",
  type="journal article in Scopus"
}