Detail publikace

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

ŠRÁMEK, J. JANKOVÝCH, R.

Originální název

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Typ

článek v časopise ve Scopus, Jsc

Jazyk

angličtina

Originální abstrakt

The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NNM-1. The aim of this work is to determine accuracy of measurements on this machine.

Klíčová slova

accuracy of measurement, length measurement, measurement repeatability, measurement reproducibility, measurement uncertainty, measuring device, nanometrology, ruby ball

Autoři

ŠRÁMEK, J.; JANKOVÝCH, R.

Vydáno

30. 11. 2016

Nakladatel

MM Science Journal

Místo

ČR

ISSN

1805-0476

Periodikum

MM Science Journal

Ročník

2016

Číslo

6

Stát

Česká republika

Strany od

1643

Strany do

1647

Strany počet

5

URL

http://www.mmscience.eu/content/file/archives/MM_Science_2016203.pdf

BibTex

@article{BUT131340,
  author="Jan {Šrámek} and Róbert {Jankových}",
  title="ACCURACY OF MEASUREMENT IN NANOMETROLOGY",
  journal="MM Science Journal",
  year="2016",
  volume="2016",
  number="6",
  pages="1643--1647",
  doi="10.17973/MMSJ.2016\{_}12\{_}2016203",
  issn="1805-0476",
  url="http://www.mmscience.eu/content/file/archives/MM_Science_2016203.pdf"
}