Detail publikace

A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect

CHMELA, O. SADÍLEK, J. VALLEJOS, S. HUBÁLEK, J.

Originální název

A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect

Anglický název

A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect

Jazyk

en

Originální abstrakt

We develop a chip based on microelectrode arrays to be used in the fabrication of single nanowire (NW) systems for gas detection. The proposed topology of test electrode system was designed to understand the different factor involved in the dielectrophoresis (DEP) process and determine the optimal conditions for a facile integration and alignment of semiconducting metal oxide NWs produced via aerosol-assisted chemical vapor deposition (AACVD). Various electrode geometries with electrode gaps between 2 and 10 µm and electrode tip-end shapes are investigated. Results obtained from SEM, optical microscopy and electrical measurement demonstrate the integration and alignment of single NW across the electrodes only for the electrodes with gaps below 3 µm. These results are discussed and further improvements in the design of these systems are suggested.

Anglický abstrakt

We develop a chip based on microelectrode arrays to be used in the fabrication of single nanowire (NW) systems for gas detection. The proposed topology of test electrode system was designed to understand the different factor involved in the dielectrophoresis (DEP) process and determine the optimal conditions for a facile integration and alignment of semiconducting metal oxide NWs produced via aerosol-assisted chemical vapor deposition (AACVD). Various electrode geometries with electrode gaps between 2 and 10 µm and electrode tip-end shapes are investigated. Results obtained from SEM, optical microscopy and electrical measurement demonstrate the integration and alignment of single NW across the electrodes only for the electrodes with gaps below 3 µm. These results are discussed and further improvements in the design of these systems are suggested.

Dokumenty

BibTex


@inproceedings{BUT130238,
  author="Ondřej {Chmela} and Jakub {Sadílek} and Stella {Vallejos Vargas} and Jaromír {Hubálek}",
  title="A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect",
  annote="We develop a chip based on microelectrode arrays to be used in the fabrication of single nanowire (NW) systems for gas detection. The proposed topology of test electrode system was designed to understand the different factor involved in the dielectrophoresis (DEP) process and determine the optimal conditions for a facile integration and alignment of semiconducting metal oxide NWs produced via aerosol-assisted chemical vapor deposition (AACVD). Various electrode geometries with electrode gaps between 2 and 10 µm and electrode tip-end shapes are investigated. Results obtained from SEM, optical microscopy and electrical measurement demonstrate the integration and alignment of single NW across the electrodes only for the electrodes with gaps below 3 µm. These results are discussed and further improvements in the design of these systems are suggested.",
  address="IMAPS",
  booktitle="IMAPS Flash Conference
2nd International Microelectronics Assembly and Packaging Society
Flash Conference",
  chapter="130238",
  edition="2nd edition 2016",
  howpublished="electronic, physical medium",
  institution="IMAPS",
  year="2016",
  month="november",
  pages="1--5",
  publisher="IMAPS",
  type="conference paper"
}