Detail publikace

A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect

CHMELA, O. SADÍLEK, J. VALLEJOS, S. HUBÁLEK, J.

Originální název

A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

We develop a chip based on microelectrode arrays to be used in the fabrication of single nanowire (NW) systems for gas detection. The proposed topology of test electrode system was designed to understand the different factor involved in the dielectrophoresis (DEP) process and determine the optimal conditions for a facile integration and alignment of semiconducting metal oxide NWs produced via aerosol-assisted chemical vapor deposition (AACVD). Various electrode geometries with electrode gaps between 2 and 10 µm and electrode tip-end shapes are investigated. Results obtained from SEM, optical microscopy and electrical measurement demonstrate the integration and alignment of single NW across the electrodes only for the electrodes with gaps below 3 µm. These results are discussed and further improvements in the design of these systems are suggested.

Klíčová slova

Dielectrophoresis, mircoarrays test chip, nanowires, gas sensor

Autoři

CHMELA, O.; SADÍLEK, J.; VALLEJOS, S.; HUBÁLEK, J.

Vydáno

3. 11. 2016

Nakladatel

IMAPS

Místo

Brno

ISBN

978-80-214-5416-3

Kniha

IMAPS Flash Conference 2nd International Microelectronics Assembly and Packaging Society Flash Conference

Edice

2nd edition 2016

Strany od

1

Strany do

5

Strany počet

5

BibTex

@inproceedings{BUT130238,
  author="Ondřej {Chmela} and Jakub {Sadílek} and Stella {Vallejos Vargas} and Jaromír {Hubálek}",
  title="A chip based on microelectrode arrays for the fabrication of single nanowire system via dielectrophoresis effect",
  booktitle="IMAPS Flash Conference
2nd International Microelectronics Assembly and Packaging Society
Flash Conference",
  year="2016",
  series="2nd edition 2016",
  pages="1--5",
  publisher="IMAPS",
  address="Brno
",
  isbn="978-80-214-5416-3"
}