Detail publikace

The formation and properties of porous-anodic-alumina-assisted metal-oxide 3-D nanofilms for use in advanced micro-devices

MOZALEV, A. BENDOVÁ, M. PYTLÍČEK, Z. HUBÁLEK, J.

Originální název

The formation and properties of porous-anodic-alumina-assisted metal-oxide 3-D nanofilms for use in advanced micro-devices

Anglický název

The formation and properties of porous-anodic-alumina-assisted metal-oxide 3-D nanofilms for use in advanced micro-devices

Jazyk

en

Originální abstrakt

For current generation of energy conversion, distribution and storage microdevices, researchers have advocated the use of 2-D films built up of nanowires or nanotubes. The making of more complex 3-D nanostructured materials is becoming the most competitive area of research, aiming at future materials with enhanced or unusual properties and devices with substantially improved performances. Our team has developed a new way to build versatile 3-D metal-oxide-metal nanostructures that merges the benefits of advanced nanocomposite inorganic materials with the flexibility of non-lithographic electrochemical technologies based on anodization of aluminium and on so-called porous-anodic-alumina-assisted anodizing of a variety of refractory metals. To demonstrate the capability of the approach, several types of 3-D nanofilms were synthesized on substrates via anodizing sputtered Al/Nb metal layers and additionally tailoring film parameters by combining post-anodizing chemical and heat treatments. The films are composed of an array of well-defined, size-tailored, long-aspect-ratio columnlike metal-oxide protrusions, 20-200 nm in diameter, self-directed in the alumina nanopores, up to 1 mm long, in some cases being also anchored to a lower solid portion of corresponding oxide, having graded oxygen composition [1]. A patterned noble-metal mesh-like layer is formed on the column tops via the original point electrodeposition technique; the non-anodized metal layer serves as the bottom electrode. For purpose-built applications, the alumina may be selectively dissolved away, and a patterned network of vertically aligned, bottom- and top-interconnected metal-oxide nanocolumns is derived, as shown schematically in Fig. 1. SEM, TEM, XRD, XPS, EDX and electrical/dielectric measurements have been employed to reveal the films’ formation-structure-property relationship and define the areas of their potential application. application.

Anglický abstrakt

For current generation of energy conversion, distribution and storage microdevices, researchers have advocated the use of 2-D films built up of nanowires or nanotubes. The making of more complex 3-D nanostructured materials is becoming the most competitive area of research, aiming at future materials with enhanced or unusual properties and devices with substantially improved performances. Our team has developed a new way to build versatile 3-D metal-oxide-metal nanostructures that merges the benefits of advanced nanocomposite inorganic materials with the flexibility of non-lithographic electrochemical technologies based on anodization of aluminium and on so-called porous-anodic-alumina-assisted anodizing of a variety of refractory metals. To demonstrate the capability of the approach, several types of 3-D nanofilms were synthesized on substrates via anodizing sputtered Al/Nb metal layers and additionally tailoring film parameters by combining post-anodizing chemical and heat treatments. The films are composed of an array of well-defined, size-tailored, long-aspect-ratio columnlike metal-oxide protrusions, 20-200 nm in diameter, self-directed in the alumina nanopores, up to 1 mm long, in some cases being also anchored to a lower solid portion of corresponding oxide, having graded oxygen composition [1]. A patterned noble-metal mesh-like layer is formed on the column tops via the original point electrodeposition technique; the non-anodized metal layer serves as the bottom electrode. For purpose-built applications, the alumina may be selectively dissolved away, and a patterned network of vertically aligned, bottom- and top-interconnected metal-oxide nanocolumns is derived, as shown schematically in Fig. 1. SEM, TEM, XRD, XPS, EDX and electrical/dielectric measurements have been employed to reveal the films’ formation-structure-property relationship and define the areas of their potential application. application.

Dokumenty

BibTex


@misc{BUT119661,
  author="Alexander {Mozalev} and Mária {Bendová} and Zdeněk {Pytlíček} and Jaromír {Hubálek}",
  title="The formation and properties of porous-anodic-alumina-assisted metal-oxide 3-D nanofilms for use in advanced micro-devices",
  annote="For current generation of energy conversion, distribution and storage microdevices,
researchers have advocated the use of 2-D films built up of nanowires or nanotubes. The
making of more complex 3-D nanostructured materials is becoming the most competitive area of research, aiming at future materials with enhanced or unusual properties and devices with substantially improved performances.
Our team has developed a new way to build versatile 3-D metal-oxide-metal nanostructures that merges the benefits of advanced nanocomposite inorganic materials with the flexibility of non-lithographic electrochemical technologies based on anodization of aluminium and on so-called porous-anodic-alumina-assisted anodizing of a variety of refractory metals.
To demonstrate the capability of the approach, several types of 3-D nanofilms were synthesized on substrates via anodizing sputtered Al/Nb metal layers and additionally tailoring film parameters by combining post-anodizing chemical and heat treatments.
The films are composed of an array of well-defined, size-tailored, long-aspect-ratio columnlike metal-oxide protrusions, 20-200 nm in diameter, self-directed in the alumina nanopores, up to 1 mm long, in some cases being also anchored to a lower solid portion of corresponding oxide, having graded oxygen composition [1]. A patterned noble-metal mesh-like layer is formed on the column tops via the original point electrodeposition
technique; the non-anodized metal layer serves as the bottom electrode. For purpose-built applications, the alumina may be selectively dissolved away, and a patterned network of vertically aligned, bottom- and top-interconnected metal-oxide nanocolumns is derived, as shown schematically in Fig. 1. SEM, TEM, XRD, XPS, EDX and electrical/dielectric measurements have been employed to reveal the films’ formation-structure-property
relationship and define the areas of their potential application.
application.",
  booktitle="Book of Abstracts of the VII Aluminium Surface, Science and Technology",
  chapter="119661",
  howpublished="online",
  year="2015",
  month="may",
  pages="41--41",
  type="abstract"
}