Detail publikace
Optical pressure sensors in LTCC technology
Originální název
Optical pressure sensors in LTCC technology
Anglický název
Optical pressure sensors in LTCC technology
Jazyk
en
Originální abstrakt
This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.
Anglický abstrakt
This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.
BibTex
@proceedings{BUT119070,
author="Jakub {Somer} and František {Urban} and František {Urban} and Ivan {Szendiuch}",
title="Optical pressure sensors in LTCC technology",
annote="This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.",
booktitle="Abstracts Proceedings, International flash conference IMAPS - Czech and Slovak chapter",
chapter="119070",
howpublished="print",
year="2015",
month="october",
pages="41--42",
type="conference proceedings"
}