Detail publikace

Optical pressure sensors in LTCC technology

Originální název

Optical pressure sensors in LTCC technology

Anglický název

Optical pressure sensors in LTCC technology

Jazyk

en

Originální abstrakt

This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.

Anglický abstrakt

This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.

BibTex


@proceedings{BUT119070,
  author="Jakub {Somer} and František {Urban} and František {Urban} and Ivan {Szendiuch}",
  title="Optical pressure sensors in LTCC technology",
  annote="This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.",
  booktitle="Abstracts Proceedings, International flash conference IMAPS - Czech and Slovak chapter",
  chapter="119070",
  howpublished="print",
  year="2015",
  month="october",
  pages="41--42",
  type="conference proceedings"
}