Detail publikace

Imaging spectroscopic reflectometer based on pellicle beamsplitter

VODÁK, J. ČUDEK, V. NÁDASKÝ, P. OHLÍDAL, M.

Originální název

Imaging spectroscopic reflectometer based on pellicle beamsplitter

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Imaging spectroscopic reflectometry is a technique suitable for measurements of local optical parameters (thickness, refraction index and index of extinction) of non-uniform thin films along their surface. It is usually assumed that gradients of these non-uniformities are reasonably small. A new design of an imaging spectroscopic reflectometer provides the possibility to successfully measure high gradient non-uniformities along relatively large area of a thin film surface. A specialized low cost apparatus was developed to accomplish a higher resolution of surface imaging at the cost of reduction of the spectral range usable. The whole concept of the imaging spectroscopic reflectometer was designed to achieve high light throughput using only prefabricated optical components. Shorter measurement times and lower demands on an imaging camera used were achieved. The imaging spectroscopic reflectometer mentioned above was realized as a compact device with easy calibration and handling. Any monochromator with its output into an optical fiber can be used as a source of light. The potential of the device is demonstrated using samples with high gradients of thickness along their surfaces. A significant improvement in the resolution of thin film interference pattern images was observed in comparison with the same images obtained by means of an older UV-VIS-NIR device.

Klíčová slova

Imaging spectroscopic reflectometry, pellicle beam splitter,

Autoři

VODÁK, J.; ČUDEK, V.; NÁDASKÝ, P.; OHLÍDAL, M.

Rok RIV

2015

Vydáno

23. 9. 2015

ISBN

9781628418156

Kniha

Optical Systems Design 2015: Optical Design and Engineering VI

Edice

9626

ISSN

0277-786X

Periodikum

Proceedings of SPIE

Číslo

9626

Stát

Spojené státy americké

Strany od

2L-1

Strany do

2L-8

Strany počet

8