Detail publikace

Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBr3 in Solar Cell Production

MOJROVÁ, B. MIHAILETCHI, V.

Originální název

Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBr3 in Solar Cell Production

Anglický název

Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBr3 in Solar Cell Production

Jazyk

en

Originální abstrakt

Replacing a dry oxidation with a wet oxidation process during low pressure diffusion using boron tribromide (BBr3) in solar cell production

Anglický abstrakt

Replacing a dry oxidation with a wet oxidation process during low pressure diffusion using boron tribromide (BBr3) in solar cell production

Dokumenty

BibTex


@inproceedings{BUT114194,
  author="Barbora {Mojrová} and Valentin {Mihailetchi}",
  title="Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBr3 in Solar Cell Production",
  annote="Replacing a dry oxidation with a wet oxidation process during low pressure diffusion using boron tribromide (BBr3) in solar cell production",
  address="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií",
  booktitle="Proceedings of the 21st Conference STUDENT EEICT 2015",
  chapter="114194",
  howpublished="electronic, physical medium",
  institution="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií",
  year="2015",
  month="april",
  pages="376--380",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií",
  type="conference paper"
}