Detail publikace

Barrier SiO2-like coatings for archaeological artefacts preservation

PROCHÁZKA, M. BLAHOVÁ, L. KRČMA, F.

Originální název

Barrier SiO2-like coatings for archaeological artefacts preservation

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Thin film chemical vapour deposition technique has been used for more than 50 years. Introducing organosilicones as precursors, e.g. hexamethyldisiloxane (HMDSO) or tetraethylorthosilicate (TEOS), brought new possibilities to this method. Barrier properties of thin films have become an important issue, especially for army and emergency services as well as for food and drink manufacturers. Our work is focused on protective HMDSO thin films for encapsulating cleaned archaeological artefacts, preventing the corrosion from destroying these historical items. Thin films are deposited via plasma enhanced chemical vapour deposition (PECVD) technique using low pressure capacitively coupled plasma in flow regime. Oxygen transmission rate (OTR) measurement was chosen as the most important one for characterization of barrier properties of deposited thin films. Lowest OTR reached for 50 nm thin film thickness was 120 cm3 m-2 atm-1 day-1. Samples were also analyzed by Fourier Transform Infrared Spectrometry (FTIR) to determine their composition. Optical emission spectra and thin film thickness were measured during the deposition process. We optimized the deposition parameters for barrier layers by implementation of pulsed mode of plasma and argon plasma pre-treatment into the process.

Klíčová slova

PECVD, barrier coating, HMDSO, OTR

Autoři

PROCHÁZKA, M.; BLAHOVÁ, L.; KRČMA, F.

Vydáno

4. 11. 2016

Nakladatel

IOP Publishing

ISSN

1742-6588

Periodikum

Journal of Physics: Conference Series

Ročník

768

Číslo

1

Stát

Spojené království Velké Británie a Severního Irska

Strany od

012013-1

Strany do

012013-6

Strany počet

6

URL

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