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Course detail

Microelectronic technologies

Course unit code: FEKT-DME2A
Academic year: 2017/2018
Type of course unit: optional specialized
Level of course unit: Doctoral (3rd cycle)
Year of study: 1
Semester: summer
Number of ECTS credits:
Learning outcomes of the course unit:
Preview of the mehods and techniques in thin-film and semicoductor technology, design skill of the microstructures and nanostructures using advanced techniques of fabrication.
Mode of delivery:
90 % face-to-face, 10 % distance learning
Not applicable.
Recommended optional programme components:
Not applicable.
Course contents (annotation):
The subject is focused on a study of the microelectronic technologies using seminary and self-study. Students will take-up overview about elemental and advanced methods and techniques, material utilization, and rules for microstructure creation. They will know how to take bearings in areas of the design and fabrication, as well about utilization of nanotechnologies in microelectronics.
Recommended or required reading:
Not applicable.
Planned learning activities and teaching methods:
Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.
Assesment methods and criteria linked to learning outcomes:
oral examine
Language of instruction:
Work placements:
Not applicable.
Course curriculum:
Elemental methods for the thin-film deposition, materials in the thin-film technology, topography design, lithography, anisotropic and isotropic etching of the microstructures, the thermal and chemical oxidation, anodization, impurity diffusion, passive layers, modern methods of the microstructure creation, MEMS, nanotechnology and nanoelectronics, NEMS.
Student is going to familiarize with the elemental and advanced methods and techniques for the microstructures and semiconductor devices fabrication, with materials, rules for their creation and modern nanotechnologies in semiconductor industry.
Specification of controlled education, way of implementation and compensation for absences:
Not applicable.

Type of course unit:

Seminar: 39 hours, optionally
Teacher / Lecturer: doc. Ing. Jaromír Hubálek, Ph.D.

The study programmes with the given course