Course detail

Plasma Chemistry

FCH-MCO_PLA1Acad. year: 2019/2020

This course is focused on basic properties and processes taking place in plasma, including their diagnostics and possible applications. Students are introduced to plasma thermodynamics and kinetics (non-equilibrium and equilibrium plasma, collision processes, distribution functions, basic transport processes in plasma). Lectures also provide a list of basic methods of plasma diagnostics (spectral, probe, and corpuscular methods). The main part of the course deals with plasma in labs, its properties, particular types of electrical discharges, its generation and possible applications (dc, ac, RF, MW, discharges in liquids, plasma excited at high pressure, capacitive and inductive coupled plasma). A list of plasma chemical processes contains especially reactions in active and post-discharge plasma, surface treatment of various materials, creation of thin layers (PE CVD, PA CVD), plasma polymerization, plasma spraying, sputtering, and etching. Moreover, lasers, plasma displays, eletric arc, electric beam, and plasmas as illumination tools belong to special ideal as well as non-ideal plasma kinds using assisted chemical reactions.

Learning outcomes of the course unit

Passing the course provides students knowledge of plasma fundamental, principles of plasma generation and its diagnostics and present technology of plasma chemistry.


Physical chemistry - thermodynamics, kinetics. Physics - mass point motion, electric field and current, magnetic field Mathematics - differential equations


Not applicable.

Recommended optional programme components

Not applicable.

Recommended or required reading

Janča J., Kudrle V., Eliáš M., Zajíčková Z.: Fyzika plazmatu I. Masarykova Univerzita, Brno 2003 (CS)
Chen F. F. / Rohlena K.: Úvod do fyziky plazmatu. ACADEMIA, Praha 1984 (CS)
Kulhánek P.: Teorie plazmatu. ČVUT, Praha 2008 (CS)
Roth J. R.: Industrial Plasma Engineering Volume 2: Applications to Nonthermal Plasma Processing. Institute of Physics Publishing, Bristol and Philadelphia 2001. (EN)
Roth J. R.: Industrial Plasma Engineering Volume 1: Principles. Institute of Physics Publishing, Bristol and Philadelphia 1995. (EN)
Chen F., Chang J. P.: Principles of Plasma Processing. Kluwer Academic, Plenum Publishers, NewYork 2003. (EN)
Bruggeman P. J. et al.: Plasma–liquid interactions: a review and roadmap, Plasma Sources Sci. Technol. 25 (2016) 053002 (59pp) (EN)
Samukawa S. et al.: The 2012 Plasma Roadmap, J. Phys. D: Appl. Phys. 45 (2012) 253001 (37pp) (EN) (CS)

Planned learning activities and teaching methods

The course uses teaching methods in form of Lecture - 2 teaching hours per week. The e-learning system (LMS Moodle) is available to teachers and students.

Assesment methods and criteria linked to learning outcomes

Written examination. It consists of ten questions scored by points; maximal point achievement is 100, limit to pass is 50 points.

Language of instruction


Work placements

Not applicable.

Course curriculum

1. Plasma definition, ideal plasma conditions, types of plasma
2. Basic collision processes, cross section, collision frequency
3. Plasma kinetic theory, Boltzmann kinetic equation, velocity distribution functions
4. Physical plasma properties
5. Laboratory plasma breakdown conditions in gases, Townsend´s theory of electron avalanches, Paschen´s law
6. Laboratory plasma: electric discharges in gases and liquids
7. Plasma diagnostics: spectral and optical methods
8. Plasma diagnostics: probe and corpuscular methods
9. Introduction to plasma chemistry, conditions for realization of plasma-chemical reactions, reactions in non-equilibrium chemical kinetics, kinetics of plasma-chemical reactions
10. Plasma polymerisation, surface treatment of synthetic and natural materials
11. Selected plasma-chemical technologies: plasma etching, sputtering and spraying, thin film deposition (PE CVD, PA CVD)
12. Special kinds of plasma with participation of chemical reactions: illumination techniques, plasma displays, chemical lasers
13. Electric arc, electron beam processing


The course of Plasma Chemistry is focused on fundamental properties of plasma state and present methodology of plasma chemistry in order to let students apply the unique physical characteristics of plasma to the fields such as material science, microelectronics, biology, and polymer, organic, inorganic and analytical chemistry.

Specification of controlled education, way of implementation and compensation for absences


Classification of course in study plans

  • Programme NPCP_SCH Master's

    branch NPCO_SCH , 1. year of study, summer semester, 4 credits, compulsory-optional

  • Programme NKCP_SCH Master's

    branch NKCO_SCH , 1. year of study, summer semester, 4 credits, compulsory-optional

  • Programme CKCP_CZV lifelong learning

    branch CKCO_CZV , 1. year of study, summer semester, 4 credits, compulsory-optional

Type of course unit



26 hours, optionally

Teacher / Lecturer