Course detail
Microtechnologies
CEITEC VUT-DS107Acad. year: 2019/2020
Not applicable.
Supervisor
Learning outcomes of the course unit
Not applicable.
Prerequisites
Not applicable.
Co-requisites
Not applicable.
Recommended optional programme components
Not applicable.
Recommended or required reading
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1,2, Edited by P. Rai-Choudhury. Society of Photo-Optical Instrumentation Engineers, 1997
Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press, 2011
Tai-Ran Hsu, MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering. Wiley, 2008
Planned learning activities and teaching methods
Not applicable.
Assesment methods and criteria linked to learning outcomes
Not applicable.
Language of instruction
Czech
Work placements
Not applicable.
Aims
Not applicable.
Classification of course in study plans
- Programme STIPMN Doctoral
branch PM , 1. year of study, winter semester, 0 credits, compulsory-optional
- Programme STIPMNK Doctoral
branch PM , 1. year of study, winter semester, 0 credits, compulsory-optional
- Programme STIAMN Doctoral
branch AM , 1. year of study, winter semester, 0 credits, compulsory-optional
- Programme STIPMN Doctoral
branch PNTMT , 1. year of study, winter semester, 0 credits, compulsory-optional
- Programme STIPMN Doctoral
branch PNTMT , 1. year of study, winter semester, 0 credits, compulsory-optional
- Programme STIAMN Doctoral
branch ANTMT , 1. year of study, winter semester, 0 credits, compulsory-optional
- Programme STIPMNK Doctoral
branch PM , 2. year of study, winter semester, 0 credits, compulsory-optional
- Programme STIPMN Doctoral
branch PM , 2. year of study, winter semester, 0 credits, compulsory-optional
branch PNTMT , 2. year of study, winter semester, 0 credits, compulsory-optional - Programme STIPMN Doctoral
branch PNTMT , 2. year of study, winter semester, 0 credits, compulsory-optional
eLearning
eLearning: opened course