Diagnostic Methods in Electroengineering
FEKT-MDMEAcad. year: 2018/2019
Organization of testing in Czech Rep. and EU. Diagnostic methods for evaluation of properties and parameters of electroinsulating materials and systems. Microscopic, spectroscopic and difractometric diagnostic methods, physical principles and their use. Diagnostic methods for evaluation of properties of semiconductor wafers and structures, of contamination and defects in semiconductor materials. Theory of evaluation of measured data.
Learning outcomes of the course unit
At the end of the course, the student will be able to:
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.
Knowledge of mathematics and physics at the bachelor level of a master's degree at a technical university.
Recommended optional programme components
Recommended or required reading
Van Zant, P.: Microchip fabrication. Fourth edition. McGraw-Hill Publication. New York, 2000. (EN)
Reimer,L.:Scanning electron microscopy,Springer Verlag Berlin,2005 (EN)
Frank,L., Král,J.: Metody analýzy povrchů. Iontové, sondové a speciální metody. Academia, Praha,2002 (CS)
Mentlík, V., Pihera, J. a kol.: Diagnostika elektrických zařízení. BEN 2008, ISBN 978-80-7300-2 (CS)
OĆonnor, D.J. and others: Surface Analysis Methods in Materials Science. Springer Berlin 2003. ISBN0931-5195 (EN)
Jirák, J., Havlíček, S., Rozsívalová, Z.: Diagnostika a zkušebnictví. Elektronické texty, Brno 2002. (CS)
Koblížek,V. Měření a kontrola v elektrotechnologii ČVUT Praha,1991. (CS)
Planned learning activities and teaching methods
Teaching methods include lectures, numerical exercises and practical laboratories. Course is taking advantage of e-learning system. Students have to write a single project during the course.
Assesment methods and criteria linked to learning outcomes
up to 40 points during the semester (10 points from laboratory seminars and 30 points from individual work and its presentation)
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.
Language of instruction
The aim of the course is to acquaint students with theory of diagnostic methods used for evaluation of properties and parameters of electroinsulating and semiconductor materials and structures, with theoretical principles of methods based on exploitation of electron beam for evaluation of structure and composition of material systems as well as with principles of evaluation of measured data.
Specification of controlled education, way of implementation and compensation for absences
Obligatory participation in teaching.