Microsensors and Micromechanical Systems
FEKT-BMMSAcad. year: 2018/2019
Fundamentals of microelectronic technology for microsensors and microsystems. Introduction into microsensors and micromechanical systems. General parameters, classification, characteristics. Fundaments of microelectronic technologies. Introduction into semiconductors and their exploiting in sensorics. Resistive microsensors (gauges, thermistors, position, ...). Capacitive microsensors. Hall's sensors. Piezoelectric sensors. CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, ...). Special types of sensors. Micromechanical systems, manufacturing of microelectromechanical systems. New trends in microsensorics and MEMS.
Learning outcomes of the course unit
Fundamental knowledge of theory and earning practical skills how to design microelectromechanical systems, microsensors and to apply methods of non-electrical quantities measurement, methodology and evaluation.
The subject knowledge on the secondary school level is required.
Recommended optional programme components
Recommended or required reading
HUBÁLEK, J.; DRBOHLAVOVÁ, J.; PRÁŠEK, J.; BUŠINOVÁ, P.; BENDOVÁ, M. Mikrosenzory a mikroelektromechanické systémy. Brno: 2012. (CS)
HUBÁLEK, J.; PRÁŠEK, J.; PEKÁRKOVÁ, J; BENDOVÁ, M.; DRBOHLAVOVÁ, J.; MAJZLÍKOVÁ, P. Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)
Planned learning activities and teaching methods
Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.
It is including:
lectures using form of technical seminary;
self-reliant practice laboratory exercise including preparation and elaboration of report;
using LMS Moodle, practical demonstration, visit of research laboratory LABSENSNANO.
Assesment methods and criteria linked to learning outcomes
Requirements for completion of a course are specified by a regulation issued by the lecturer responsible for the course and updated for every.
Language of instruction
1. Introduction to sensor technics
2. Fundametals of microelectronics technology
3. Resistive sensors
4. Capacitive sensors
5. Inductive sensors
6. Generating sensors
7. Semicoductive sensors
8. Optical sensors
9. Specialized sensors
10. Chcemical sensors and biosensors
11. Microelectromechanical sensors
Target of the subject is to present theory, principles and design of microsensors and microelectromechanical systems, to train how to design microsystems and their application.
Specification of controlled education, way of implementation and compensation for absences
The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.