Course detail

Diagnostic Methods in Electroengineering

FEKT-MDMEAcad. year: 2015/2016

Organization of testing in Czech Rep. and EU. Diagnostic methods for evaluation of properties and parameters of electroinsulating materials and systems. Diagnostic methods for evaluation of properties of semiconductor wafers and structures, of contamination and defects in semiconductor materials. Diagnostic methods based on exploitation of electron beam for evaluation of structure and composition of materials. Theory of evaluation of measured data.

Learning outcomes of the course unit

At the end of the course, the student will be able to:
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.

Prerequisites

Knowledge of electrical materials on the level of the bachelor's course Diagnostics and Testing.

Co-requisites

Not applicable.

Recommended optional programme components

Not applicable.

Recommended or required reading

Van Zant, P.: Microchip fabrication. Fourth edition. McGraw-Hill Publication. New York, 2000. (EN)
Reimer,L.:Scanning electron microscopy,Springer Verlag Berlin,2005 (EN)
Frank,L., Král,J.: Metody analýzy povrchů. Iontové, sondové a speciální metody. Academia, Praha,2002 (CS)
Mentlík, V., Pihera, J. a kol.: Diagnostika elektrických zařízení. BEN 2008, ISBN 978-80-7300-2 (CS)
OĆonnor, D.J. and others: Surface Analysis Methods in Materials Science. Springer Berlin 2003. ISBN0931-5195 (EN)

Planned learning activities and teaching methods

Teaching methods include lectures, numerical exercises and practical laboratories. Course is taking advantage of e-learning system. Students have to write a single project during the course.

Assesment methods and criteria linked to learning outcomes

up to 40 points during the semester (10 points from laboratory seminars and 30 points from individual work and its presentation)
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.

Language of instruction

Czech

Work placements

Not applicable.

Course curriculum

Diagnostics and testing. Organization of testing and certification in CR and EU. Summary of diagnostic methods.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in DC electric field.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in electric field at frequency 50 Hz and at high voltage.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in electric field at middle and high frequency.
Diagnostic methods connected with evaluation of influence of working conditions on materials properties.
Diagnostic methods for evaluation of electrical properties of semiconductor wafers and structures. Resistivity measurements, four-point probe, spreading resistance, concentration-depth profile. Methods based on evaluation of capacitance-voltage measurement.
Diagnostic methods for contamination and defect detection in semiconductor materials. Microscope techniques. AFM, AES, ESCA and SIMS techniques.
Diagnostic methods based on interaction of electrons with solid. Electron optics, resolution and depth of focus. Electron scattering and diffusion.
Diagnostic methods based on interaction of electrons with solid. Emission of electrons and X-ray quanta. Backscattered electrons and secondary electrons.
Diagnostic methods based on interaction of electrons with solid. Detectors and signal processing. Imaging with backscattered and secondary electrons.
Diagnostic methods based on interaction of electrons with solid. Diffraction crystal structure analysis. Elemental analysis.
Statistic analysis of one-dimensional data. Random sampling characteristics. Spot and interval parameters estimation of normal, exponential and Weibull's distribution.

Aims

The aim of the course is to acquaint students with theory of diagnostic methods used for evaluation of properties and parameters of electroinsulating and semiconductor materials and structures, with theoretical principles of methods based on exploitation of electron beam for evaluation of structure and composition of material systems as well as with principles of evaluation of measured data.

Specification of controlled education, way of implementation and compensation for absences

Obligatory participation in teaching.

Classification of course in study plans

  • Programme EEKR-M Master's

    branch M-EVM , 2. year of study, winter semester, 6 credits, compulsory

  • Programme EEKR-M1 Master's

    branch M1-EVM , 2. year of study, winter semester, 6 credits, compulsory

  • Programme EEKR-CZV lifelong learning

    branch ET-CZV , 1. year of study, winter semester, 6 credits, compulsory

Type of course unit

 

Lecture

39 hours, optionally

Teacher / Lecturer

Computer exercise

10 hours, compulsory

Teacher / Lecturer

Laboratory exercise

12 hours, compulsory

Teacher / Lecturer

The other activities

4 hours, compulsory

Teacher / Lecturer