Course detail

Design of Vacuum Systems for Technologies in Microelectronics

FEKT-BEPTAcad. year: 2015/2016

Graduand of lectures will have option knowledges from field of fysical poperties of diluted gass, (laws for gases, flowing of gass, mechanism of gass). Object interests with design of vacuum systems with respect to pumping effectivity and price. It interests about principles of measuring of vacuum. Graduaters adopt basing knowledge of design software VACTRAN. They will know anything about vacuum technological operating in vacuum and surroundings of technical gasses (vacuum evaporating, sputtering, ion etching and the others). They adopt also informations about construction of technological equipments for this types of production in electronics. In lectures will be presented english terminology.



Language of instruction

Czech

Number of ECTS credits

5

Mode of study

Not applicable.

Guarantor

doc. Ing. Josef Šandera, Ph.D.

Department

Department of Microelectronics (UMEL)

Learning outcomes of the course unit

Graduater is able:

- list basic units of pressure, pressure conversion
- define basic physical properties of diluted gass and properties by flowing
- explain physical principles and construction of vacuum pumps
- explain physical principles and construction of vacuum gauges
- select convenient materials with respects to the vacuum
- explain what it is vakuum evaporating and sputtering and when used it
- calculate and design simple vacuum curcuit
- used professional software VACTRAN in summary
- used basic english terminology

Prerequisites

The subject knowledge on the secondary school level is required.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Techning methods include lectures, computer laboratories and practical laboratories

Assesment methods and criteria linked to learning outcomes

Laboratory lectures - 23 marks
Finisch examine - 77 marks
(oral and written examine)

Course curriculum

1) Classification of vacuum, gass, steam, pressure and units, conversion of units, properties of atoms and molecules, ideal gass laws Boyle Marriot, Gay Lussac, state equation of gass, Dalton law, important constants, surface tension og gass.
2) Basics of cinetic theory of gases - gass by low and high pressure, particle flux,dependence of pressure on concentration and temperature, mean free path of gass molecule, Maxwell-Boltzmann molecular velocity distribution curve, valume and transport phenomenon - diffusion, effusion,gass viscosity, coefficients of transport in low and high pressure.
3) Flowing gass through pipes - analogy between electric current, volume and mass flow of gass, resistivity and conductivity of pipe, connecting of pipes, types of flow - turbulents, viscous,molecular, efuse.
4) Surface phenomenons - sorption, dessorption, the strenght of bonds, monomolecular and multimolecular layers, basic sorption isotherms, vapour pressure, capillary condensation.
5) Ionizing gas,moving of electrons in electric and magnetic field, plazma and her properties.
6) Lowest pressure and pumping speed - pumping speed and measuring it, time for pumping on defined pressure, lowest pressure, influens of leaks on pressure, getrs, schematic diagrams
7) Theory and construction of pumps - parameters of pumps, transport and sorption pumps, rotating pumps, Root´s pump, turbomolecular pump, vapour ejector and diffusion pumps. Sorption pump, titanum and sublimation titanum discharge pump, diode and triode ion pump. Cryopumping mechanism, cryo-sorption - zeolit pumps.
8) Vacuum measuring - absolut vaccuometers, Torricelli vacuometer, U-tube vacuometer,McLeod, thermal conductivity vacuometers - termocouple and Pirani gauge, ionization gauges, discharge (Penning) gauge, ionizatin gauges, construction of gauge.
9) Leak detection, construction of vacuum systems - materials, design, electrical lead-throughs, air taps, valves, seals, design of industrial constructions, movementand holders in vacuum, handling with substrates, materials in vacuum.
10) Design of vacuum systems, economical criteria, particularity of design systems for research and serial production, properties and possibility software VACTRAN.
11) Technological principles for electronics and microelectronics - vacuum evaporating, ion sputtering, plazmatic etching and cleaning.
12) Industry constructions for technological equipment, metalizing of plastics - MP capacitors production, metal contacts production, modification of surfaces.





general gass law

Work placements

Not applicable.

Aims

Acquirement of the knowledges about modern vacuum technics for use in electronics, in electrotechnical and mechanical industry. Explanation with using software (USA) for design of vacuum systems.

Specification of controlled education, way of implementation and compensation for absences

Laboratory practtical class. Numerical practical class, Computer practical class. All lectures are mandatory. The regular apologied lectures students could compensate after consultation with teacher (during semester, in extremis in the credit week).

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Fikes,L.: Fyzika nízkých tlaků, SNTL, Praha, 1991. (CS)
Pátý,L.: Vakuová technika, ČVUT, Praha, 1990. (CS)
Grozskowski J.: Technika vysokého vakua, SNTL, Praha, 1981 (CS)
V.Hulínský, K.Jurek: Zkoumání látek elektronovým paprskem, SNTL, Praha 1982 (CS)
J. F. O‘Hanlon: A User‘s Guide to Vacuum Technology, John Wiley & Sons Inc., Hoboken, New Jersey (EN)
A.Roth: Vacuum Technology, 1990 Elsevier Science B.V. 1990, ISBN 0 444 880100 (EN)
Jaroslav Boušek, Josef Šandera: Elektrovakuové přístroje a technika nízkých teplot, skriptum FEKT VUT, Brno 2003 Jaroslav Boušek, Josef Šandera: Elektrovakuové přístroje a technika nízkých teplot, skriptum FEKT VUT, Brno 2003 (CS)
Professional Engineering Computations - VacTran-Vacuum Technology Software, www.vactran.com (EN)
ŠANDERA, J.,BOUŠEK, J., KOSINA, P.:Návrh vakuových soustav pro technologie v mikroelektronice. Prezentace projektu KISP. Brno 2014

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme EEKR-B Bachelor's

    branch B-MET , 3. year of study, summer semester, optional specialized

Type of course unit

 

Lecture

26 hours, optionally

Teacher / Lecturer

doc. Ing. Josef Šandera, Ph.D.

Syllabus

Gas, vapour, pressure. Basic principles and laws for the ideal gases. Kinetic theory of gases - basic principles. Mean free path of gas molecules. Thermal velocity of gas molecules, Maxwell-Boltzmann statistic.
Pumping processes. Gas transport through vacuum pipes, gas conductance of vacuum pipes. Influence of leakage and desorption. Surface processes. Different types of gas transport - turbulent, viscose, molecular and effusion.
Basic principles of gas transport - transport and getter pumps. Mechanical pumps, Roots blowers, turbo pumps. Diffusion pumps. Getter pumps.
The basic principles of vacuum equipment design. Basic technologies in the vacuum equipment production.
Electronic circuits for electro-vacuum instruments. High voltage power sources, high frequency generators. Circuits for very low current measurement. Circuits for the potential isolation, electronic protection circuits.
Devices based on gas volume and gas particle properties. Thermocouple gauges, Pirani gauges, mass flow-meters. Ion gauges.
Devices based on trajectory control of charged particles thermal emission, ionization, electromagnetic and electrostatic deflection.
Devices based on trajectory control of charged particles mass spectrometers.
Devices based on trajectory control of charged particles electron microscopes.
Devices based on usage of cryogenic technology - cryogenic technology in electro-vacuum technology, cryogenic and cryosorption pumps.
Devices based on usage of cryogenic technology - superconductivity, exploitation of superconductivity.
Devices based on usage of gas dicharges - types of discharges, examples of their exploitation. Plasma parameters, measurement of plasma parameters.
Devices based on usage of gas dicharges - cathode sputtering, plasma deposition from gas phase, plasma etching. Titanium discharge pump, ionic pump.

Fundamentals seminar

12 hours, compulsory

Teacher / Lecturer

doc. Ing. Josef Šandera, Ph.D.

Syllabus

Gas, vapour, pressure, Measurement units and their relation. Laws for the ideal gases. Kinetic theory of gases. basic principles. Relation between pressure, concentration and temperature of gas.
The thermal velocity of the gas molecules, Maxwell-Boltzmann statistic. The mean free path of gas molecules. Volume processes and transport of gas, diffusion, viscosity of gas, thermal conductivity of gas.
The gas transport through the vacuum pipes. Gas conductance of Vacuum pipes. Ohms law in gas transport. The volume and mass flow of the gas. The different mechanism of the gas transport - turbulent, viscose, molecular, effusion.
The limit pressure of the vacuum equipment. Pumping speed of the vacuum pumps and its measurement, the exhaust time. The influence of leakage and desorption.
The surface processes, adsorption, desorption, monomolecular and multimolecular layers, basic adsorption isotherms, saturated vapour pressure.
The basic principles of vacuum equipment design.

Laboratory exercise

14 hours, compulsory

Teacher / Lecturer

doc. Ing. Josef Šandera, Ph.D.

Syllabus

Opening laboratory exercise, acquaintance with laboratory, work safety at vacuum technology.
Measurement of pumping velocity of pumping units.
Calibration of thermocouple gauge.
Measurement of vacuum conductivity of pipes.
Measurement of gas flow, calibration of flowmeter.
Materials and production methods used in vacuum technology.
Design principles of vacuum devices.
Searching of vacuum leakages.
Vacuum evaporation.
Cathode sputtering.