Publication detail

Protection of Archaeological Artefacts by Deposition of Parylene and SiOx Thin Films

BALAŠTÍKOVÁ, R. PROCHÁZKA, M. MENČÍK, P. HORÁK, J. PŘIKRYL, R. KRČMA, F.

Original Title

Protection of Archaeological Artefacts by Deposition of Parylene and SiOx Thin Films

English Title

Protection of Archaeological Artefacts by Deposition of Parylene and SiOx Thin Films

Type

abstract

Language

en

Original Abstract

This contribution focuses on possibilities of the archaeological artefacts (copper, iron, brass and bronze) protection by a thin film deposition of SiOx and Parylene thin films. SiOx layers were deposited by PECVD in a low pressure reactor with capacitively coupled plasma discharge (13.56 MHz). Mixture of Hexamethyldisiloxane with oxygen was used as a precursor of plasmachemical reactions. The parylene thin films were prepared by standard CVD technique. The coatings were characterized by various methods in order to obtain information about their thickness (ellipsometry), chemical structure (FTIR) and elemental composition (XPS), surface morphology (LCSM, SEM) and barrier properties (OTR). Standard corrosion tests were performed to determine the effectiveness of corrosion protection. The results were compared with those on samples treated by conventional conservation procedures.

English abstract

This contribution focuses on possibilities of the archaeological artefacts (copper, iron, brass and bronze) protection by a thin film deposition of SiOx and Parylene thin films. SiOx layers were deposited by PECVD in a low pressure reactor with capacitively coupled plasma discharge (13.56 MHz). Mixture of Hexamethyldisiloxane with oxygen was used as a precursor of plasmachemical reactions. The parylene thin films were prepared by standard CVD technique. The coatings were characterized by various methods in order to obtain information about their thickness (ellipsometry), chemical structure (FTIR) and elemental composition (XPS), surface morphology (LCSM, SEM) and barrier properties (OTR). Standard corrosion tests were performed to determine the effectiveness of corrosion protection. The results were compared with those on samples treated by conventional conservation procedures.

Keywords

SiOx plasma deposition, parylene films, barriere properties

Released

18.06.2012

Location

Praha

ISBN

1805-7594

Periodical

Symposium on Plasma Physics and Technology

Year of study

1

Number

1

State

CZ

Pages from

139

Pages to

139

Pages count

1

Documents

BibTex


@misc{BUT93169,
  author="Radka {Veverková} and Michal {Procházka} and Přemysl {Menčík} and Jakub {Horák} and Radek {Přikryl} and František {Krčma}",
  title="Protection of Archaeological Artefacts by Deposition of Parylene and SiOx Thin Films",
  annote="This contribution focuses on possibilities of the archaeological artefacts (copper, iron, brass and bronze) protection by a thin film deposition of SiOx and Parylene thin films. SiOx layers were deposited by PECVD in a low pressure reactor with capacitively coupled plasma discharge (13.56 MHz). Mixture of Hexamethyldisiloxane with oxygen was used as a precursor of plasmachemical reactions. The parylene thin films were prepared by standard CVD technique. The coatings were characterized by various methods in order to obtain information about their thickness (ellipsometry), chemical structure (FTIR) and elemental composition (XPS), surface morphology (LCSM, SEM) and barrier properties (OTR). Standard corrosion tests were performed to determine the effectiveness of corrosion protection. The results were compared with those on samples treated by conventional conservation procedures.",
  chapter="93169",
  number="1",
  year="2012",
  month="june",
  pages="139--139",
  type="abstract"
}