Publication detail

Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

PEKÁREK, J. VRBA, R. MAGÁT, M. KULHA, P.

Original Title

Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

English Title

Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

Type

conference paper

Language

en

Original Abstract

Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. The arrays with freestanding carbon nanotubes were created. It is possible to apply this method of CNTs preparation in many areas, such as sensor-based applications. For example, thanks to the CNTs dimensions is possible to increase the surface in capacitance pressure sensors that are one of the most using in microelectronic devices for pressure sensing. The novel MEMS structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was chosen by means of electrostatic models analysis. There were proposed five structures and the best solution was selected the chessboard structure, since it provides the suitable capacity for the sensor. The computing model supposes geometric symmetry of created CNTs arrays, thanks to that it was necessary to find only two dimensions (width of CNTs array and gap between those arrays). The very first laboratory results measured on fabricated structures show very accurate values which correspond with simulated results.

English abstract

Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. The arrays with freestanding carbon nanotubes were created. It is possible to apply this method of CNTs preparation in many areas, such as sensor-based applications. For example, thanks to the CNTs dimensions is possible to increase the surface in capacitance pressure sensors that are one of the most using in microelectronic devices for pressure sensing. The novel MEMS structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was chosen by means of electrostatic models analysis. There were proposed five structures and the best solution was selected the chessboard structure, since it provides the suitable capacity for the sensor. The computing model supposes geometric symmetry of created CNTs arrays, thanks to that it was necessary to find only two dimensions (width of CNTs array and gap between those arrays). The very first laboratory results measured on fabricated structures show very accurate values which correspond with simulated results.

Keywords

Micro-Electro-Mechanical System (MEMS), capacitive sensor, carbon nanotubes

RIV year

2011

Released

21.09.2011

Publisher

Tanger Ltd.

Location

Ostrava

ISBN

978-80-87294-27-7

Book

NANOCON 2011 - Conference Proceedings

Edition

1

Pages from

491

Pages to

495

Pages count

5

Documents

BibTex


@inproceedings{BUT73585,
  author="Jan {Pekárek} and Radimír {Vrba} and Martin {Magát} and Pavel {Kulha}",
  title="Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology",
  annote="Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. The arrays with freestanding carbon nanotubes were created. It is possible to apply this method of CNTs preparation in many areas, such as sensor-based applications. For example, thanks to the CNTs dimensions is possible to increase the surface in capacitance pressure sensors that are one of the most using in microelectronic devices for pressure sensing. The novel MEMS structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was chosen by means of electrostatic models analysis. There were proposed five structures and the best solution was selected the chessboard structure, since it provides the suitable capacity for the sensor. The computing model supposes geometric symmetry of created CNTs arrays, thanks to that it was necessary to find only two dimensions (width of CNTs array and gap between those arrays). The very first laboratory results measured on fabricated structures show very accurate values which correspond with simulated results.",
  address="Tanger Ltd.",
  booktitle="NANOCON 2011 - Conference Proceedings",
  chapter="73585",
  edition="1",
  howpublished="electronic, physical medium",
  institution="Tanger Ltd.",
  year="2011",
  month="september",
  pages="491--495",
  publisher="Tanger Ltd.",
  type="conference paper"
}