Publication detail

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

NEDĚLA, V. KONVALINA, I. LENCOVÁ, B. ZLÁMAL, J.

Original Title

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Type

journal article - other

Language

English

Original Abstract

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

Keywords

Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models

Authors

NEDĚLA, V.; KONVALINA, I.; LENCOVÁ, B.; ZLÁMAL, J.

RIV year

2011

Released

21. 7. 2011

ISBN

0168-9002

Periodical

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Year of study

645

Number

1

State

Kingdom of the Netherlands

Pages from

79

Pages to

83

Pages count

5

BibTex

@article{BUT72697,
  author="Vilém {Neděla} and Ivo {Konvalina} and Bohumila {Lencová} and Jakub {Zlámal}",
  title="Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM",
  journal="NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT",
  year="2011",
  volume="645",
  number="1",
  pages="79--83",
  issn="0168-9002"
}