Publication detail

Diagnostics and optimization of ion source parameters

VOBORNÝ, S., ŠIKOLA, T., PRŮŠA, S., ZLÁMAL, J., BÁBOR, P.

Original Title

Diagnostics and optimization of ion source parameters

Type

conference paper

Language

English

Original Abstract

This contribution deals with diagnostics and consequent optimization of plasmatic ion source. Ion-beam current density and ion current loss measurements are determined with the attempt of improving ion-beam transportation characteristics.

Key words in English

ion source, optimization, thin film deposition

Authors

VOBORNÝ, S., ŠIKOLA, T., PRŮŠA, S., ZLÁMAL, J., BÁBOR, P.

RIV year

2002

Released

15. 11. 2001

Publisher

FEI VUT v Brně

Location

Brno

ISBN

80-214-1992-X

Book

Sborník příspěvků konference Nové trendy ve fyzice

Pages from

304

Pages to

309

Pages count

6

BibTex

@{BUT69632
}