Publication detail

Locally resolved topography and spectroscopy of semiconductors (with lateral resolution better than 250 nm)

LÉTAL, P., TOMÁNEK, P., DOBIS, P., GRMELA, L., BRÜSTLOVÁ, J.

Original Title

Locally resolved topography and spectroscopy of semiconductors (with lateral resolution better than 250 nm)

Czech Title

Lokálně rozlišující topografie a spoktroskopie polovodičů (s příčným rozlišením lepším než 250 nm)

English Title

Locally resolved topography and spectroscopy of semiconductors (with lateral resolution better than 250 nm)

Type

book chapter

Language

en

Original Abstract

Locally resolved topography and spectroscopy of semiconductors show both the better lateral resolution than 250 nm using nondestructive testing.

Czech abstract

Lokálně rozlišující topografie a spoktroskopie polovodičů (s příčným rozlišením lepším než 250 nm)se ukazuje jako vhodný nástroj pro dosažení vyšší rozlišovací schopnosti.

English abstract

Locally resolved topography and spectroscopy of semiconductors show both the better lateral resolution than 250 nm using nondestructive testing.

Keywords

local topography, local spectroscopy, semiconductors, SNOM

RIV year

1998

Released

20.09.1998

Publisher

Technical University of Brno

Location

Brno

ISBN

80-214-119

Book

Electronic devices and systems (EDS´98)

Pages from

169

Pages to

172

Pages count

4

BibTex


@inbook{BUT54077,
  author="Petr {Létal} and Pavel {Tománek} and Pavel {Dobis} and Lubomír {Grmela} and Jitka {Brüstlová}",
  title="Locally resolved topography and spectroscopy of semiconductors (with lateral resolution better than 250 nm)",
  annote="Locally resolved topography and spectroscopy of semiconductors show both the better lateral resolution than 250 nm using nondestructive testing.",
  address="Technical University of Brno",
  booktitle="Electronic devices and systems (EDS´98)",
  chapter="54077",
  institution="Technical University of Brno",
  year="1998",
  month="september",
  pages="169",
  publisher="Technical University of Brno",
  type="book chapter"
}