Publication detail

IMPACT OF THE CRITICAL FLOW ON CONDITIONS OF THE PRIMARY ELECTRON BEAM PASSAGE THROUGH THE DIFFERENTIALLY PUMPED CHAMBER.

MAXA, J. NEDĚLA, V.

Original Title

IMPACT OF THE CRITICAL FLOW ON CONDITIONS OF THE PRIMARY ELECTRON BEAM PASSAGE THROUGH THE DIFFERENTIALLY PUMPED CHAMBER.

English Title

IMPACT OF THE CRITICAL FLOW ON CONDITIONS OF THE PRIMARY ELECTRON BEAM PASSAGE THROUGH THE DIFFERENTIALLY PUMPED CHAMBER.

Type

journal article - other

Language

Czech

Original Abstract

Environmentální rastrovací elektronový mikroskop otevírá nové možnosti v oblasti zkoumání různých typů vzorků a jejich fází. Článek porovnává výsledky analýz čerpání plynu u vybraných tvarů diferenciálně čerpané komory pro vytváření vakua, pomocí systému využívajícího metodu konečných objemů.

English abstract

Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. The article analyses and compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.

Keywords

EREM, CAD, FEI, Cosmos Floworks

Key words in English

EREM, CAD, FEI, Cosmos Floworks

Authors

MAXA, J.; NEDĚLA, V.

RIV year

2011

Released

13. 6. 2011

Publisher

Publishing Group of University of Defence

Location

Brno

ISBN

1802-2308

Periodical

Advances in Military Technology

Year of study

6

Number

1

State

Czech Republic

Pages from

39

Pages to

46

Pages count

9

BibTex

@article{BUT49886,
  author="Jiří {Maxa} and Vilém {Neděla}",
  title="IMPACT OF THE CRITICAL FLOW ON CONDITIONS OF THE PRIMARY ELECTRON BEAM PASSAGE THROUGH THE DIFFERENTIALLY PUMPED CHAMBER.",
  journal="Advances in Military Technology",
  year="2011",
  volume="6",
  number="1",
  pages="39--46",
  issn="1802-2308"
}