Publication detail

Using a Porous Alumina Film as a Mask for Formation of Ordered Nanostructures by Deposition Technique

HRDÝ, R. HUBÁLEK, J.

Original Title

Using a Porous Alumina Film as a Mask for Formation of Ordered Nanostructures by Deposition Technique

Type

journal article - other

Language

English

Original Abstract

The porous alumina attracts attention because of its self-ordered hexagonal structure. It can be used as a template nanosize structure, for many devices such as magnetic, electronic and optoelectronic. The aim of this method is preparation of the mask for electrodepositing nanowires directly on Si substrate. The presented technique without utilization of high-resolution electron-beam lithographs belongs to low-cost technology in the microelectronic industry. Anodic alumina has been prepared in several electrolytes by the anodization process and the characteristics of pore structures have been studied in different anodizing conditions. The thickness of aluminum film for anodization was 1-2 um. The two methods for deposition of aluminum thin film on Si substrate are thermal evaporating and sputtering. The prepared alumina structures have 15-30 nm pore diameters and 30-110 nm interpore distances. The anodization of thin alumina film deposited on Si substrate is a complicated process in comparison with the anodization of aluminum sheet but the unique properties of this method are stability of the prepared structure and simple manipulation in other operations.

Keywords

pore alumina, anodization, sputtered, nanocrystal

Authors

HRDÝ, R.; HUBÁLEK, J.

RIV year

2007

Released

1. 2. 2007

Publisher

Hutnická fakulta Technickej univerzity

Location

Košice

ISBN

1335-1532

Periodical

Acta Metallurgica Slovaca

Year of study

13

Number

2

State

Slovak Republic

Pages from

155

Pages to

158

Pages count

4

BibTex

@article{BUT44513,
  author="Radim {Hrdý} and Jaromír {Hubálek}",
  title="Using a Porous Alumina Film as a Mask for Formation of Ordered Nanostructures by Deposition Technique",
  journal="Acta Metallurgica Slovaca",
  year="2007",
  volume="13",
  number="2",
  pages="155--158",
  issn="1335-1532"
}