Publication detail

Means of Pressure Analysis using Nitride Silicon Diaphragm

MATĚJKA, F., MATĚJKOVÁ, J., VRBA, R., BENEŠ, P.

Original Title

Means of Pressure Analysis using Nitride Silicon Diaphragm

English Title

Means of Pressure Analysis using Nitride Silicon Diaphragm

Type

conference paper

Language

en

Original Abstract

Means of Pressure Analysis using Nitride Silicon Diaphragm

English abstract

Means of Pressure Analysis using Nitride Silicon Diaphragm

Keywords

Pressure Analysis Nitride Silicon Diaphragm

RIV year

2002

Released

15.09.2001

Publisher

WSES Press

Location

Brazil

ISBN

960-8052-39-4

Book

Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001

Edition number

1

Pages from

70

Pages to

73

Pages count

4

Documents

BibTex


@inproceedings{BUT3991,
  author="František {Matějka} and Jiřina {Matějková} and Radimír {Vrba} and Petr {Beneš}",
  title="Means of Pressure Analysis using Nitride Silicon Diaphragm",
  annote="Means of Pressure Analysis using Nitride Silicon Diaphragm",
  address="WSES Press",
  booktitle="Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001",
  chapter="3991",
  institution="WSES Press",
  year="2001",
  month="september",
  pages="70",
  publisher="WSES Press",
  type="conference paper"
}