Publication detail

Carbon Nanotubes Applicated in Pressure Measurement

FICEK, R. VRBA, R.

Original Title

Carbon Nanotubes Applicated in Pressure Measurement

Type

conference paper

Language

English

Original Abstract

Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

Keywords

Carbon Nanotubes, Sensor, MEMS

Authors

FICEK, R.; VRBA, R.

RIV year

2007

Released

26. 4. 2007

Publisher

Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií

Location

Brno

ISBN

978-80-214-3410-3

Book

Proceedings of the 13th Conference STUDENT EEICT 2007

Edition number

první

Pages from

295

Pages to

298

Pages count

4

BibTex

@inproceedings{BUT23640,
  author="Richard {Ficek} and Radimír {Vrba}",
  title="Carbon Nanotubes Applicated in Pressure Measurement",
  booktitle="Proceedings of the 13th Conference STUDENT EEICT 2007",
  year="2007",
  number="první",
  pages="4",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií",
  address="Brno",
  isbn="978-80-214-3410-3"
}