New type of micro sensor with active nanoparticle surface

conference paper

English

The using of template base methods is a very low cost technology in comparison with lithographic method and pore anodized alumina is one of templates base methods. Highly ordered nanopores in a thin-film alumina template have been prepared for electrochemical micro sensors fabrication with nanopatterned surface of electrodes. The template has been grown on the micro system composes by two gold comb-like electrodes. The template is used for nanopillars or nanotubes formation on the electrodes surface. The preparation highly ordered hexagonal pore [1,2,3] structure as template is done using anodization of Al film adhered on the micro system, which is the first phase of device fabrication. The second is the nanorods or nanotubes growing on the system. The anodized alumina (AA) as a template was used for its good dielectric properties and for ability of self ordering of aluminum under anodization [2,4]. The aluminum was directly evaporated on gold microelectrodes. The film thickness was obtained about 2 um. The transformation thin aluminum film to nanopore alumina was preceeded by electrochemically controlled oxidation of aluminum. In this paper the two-step anodization [1] of thin Al film deposited on Si wafer was experimentally carried out with the aim to grow thin alumina on aluminum layer where alumina has double growing ratio causing high mechanical strain. Decreasing of the mechanical stress had to be done. The pore diameter and inter-pore distance vary in the range 15 - 30 nm and 20 - 50 nm respectively.

anodized alumina, nanopores, micro sensor, intermetallic layer

HRDÝ, R.; HUBÁLEK, J.; KLOSOVÁ, K.

2007

17. 7. 2007

IMAPS Nordic

Oulu

978-952-99751-1-2

EMPS 2007 conference proceedings

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