Publication detail

X - RAY MICROANALYSIS IN ESEM

J.Špinka, J.Jirák

Original Title

X - RAY MICROANALYSIS IN ESEM

Type

conference paper

Language

English

Original Abstract

The X-ray microanalysis performed in ESEM requires to take into account presence of gas in the specimen chamber. The impact of electron scattering causes disadvantageous general increase of concentration limits of executed analysis by additional X-ray peaks contributed by the so called skirt. At X-ray analysis scattered skirt electrons interact with atoms of specimen and produce X-rays but we do not know which X-rays are produced by primary beam and which are produced by skirt electrons. Pressure variation method is described. This method enables extrapolation of X- ray spectral measurements at higher pressures to zero pressure.

Keywords

ESEM, X-ray, microanalysis

Authors

J.Špinka, J.Jirák

RIV year

2006

Released

30. 4. 2006

Publisher

TU Brno, Department of Electrotechnolgy

Location

Brno

ISBN

80-214-3181-4

Book

7th Aba BRNO 2006

Pages from

153

Pages to

156

Pages count

4

BibTex

@inproceedings{BUT21694,
  author="Jiří {Špinka} and Josef {Jirák}",
  title="X - RAY MICROANALYSIS IN ESEM",
  booktitle="7th Aba BRNO 2006",
  year="2006",
  pages="4",
  publisher="TU Brno, Department of Electrotechnolgy",
  address="Brno",
  isbn="80-214-3181-4"
}