Publication detail

Modelling of Magnetron TiN Deposition Using the Design of Experiment

ZAHRADNÍČEK, R. MOURALOVÁ, K. PROKEŠ, T. HRABEC, P. BEDNÁŘ, J.

Original Title

Modelling of Magnetron TiN Deposition Using the Design of Experiment

Type

book chapter

Language

English

Original Abstract

The aim of this study was to find the optimal settings of magnetron sputtering deposition of thin titanium nitride layers with respect to the size and hardness of the deposited layer. Direct sputtering deposition of the ceramic target using a radiofrequency source was used for magnetron sputtering deposition. The advantage of this method is easier finding of optimal deposition parameters. X-ray reflectometry was used to characterize the coating in terms of thickness. The hardness was determined by the Berkovich tip. To optimize the thickness and hardness of the TiN coating, a rotatable central composite design of response area for pressure and performance was used. Using only statistically significant fac-tors, mathematical models of thickness and hardness of TiN coating were con-structed. Based on these mathematical models, the optimal settings of statistically significant TiN magnetron deposition factors were found.

Keywords

TiN, Magnetron deposition, XRR, Hardness, Design of experiment

Authors

ZAHRADNÍČEK, R.; MOURALOVÁ, K.; PROKEŠ, T.; HRABEC, P.; BEDNÁŘ, J.

Released

11. 3. 2021

Publisher

Springer

Location

Švýcarsko

ISBN

978-3-030-61659-5

Book

Recent Advances in Soft Computing and Cybernetics

ISBN

1434-9922

Periodical

Studies in Fuzziness and Soft Computing

Year of study

2019

Number

1

State

unknown

Pages from

63

Pages to

70

Pages count

8

URL

https://link.springer.com/chapter/10.1007/978-3-030-61659-5_6

BibTex

@inbook{BUT157678,
  author="Radim {Zahradníček} and Kateřina {Mouralová} and Tomáš {Prokeš} and Pavel {Hrabec} and Josef {Bednář}",
  title="Modelling of Magnetron TiN Deposition Using the Design of Experiment",
  booktitle="Recent Advances in Soft Computing and Cybernetics",
  year="2021",
  publisher="Springer",
  address="Švýcarsko",
  pages="63--70",
  doi="10.1007/978-3-030-61659-5\{_}6",
  isbn="978-3-030-61659-5",
  url="https://link.springer.com/chapter/10.1007/978-3-030-61659-5_6"
}