Publication detail

FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING

Hlavata, P. Maxa, J.

Original Title

FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING

English Title

FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING

Type

journal article

Language

en

Original Abstract

The paper deals with the effect of the critical flow, which is reached during pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The study compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. The problem was solved using the finite volume method by the Ansys Fluent system.

English abstract

The paper deals with the effect of the critical flow, which is reached during pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The study compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. The problem was solved using the finite volume method by the Ansys Fluent system.

Keywords

Differentially pumped chamber; ESEM; Ansys Fluent; The finite volume method; SolidWorks

Released

07.01.2019

Publisher

Universitas Publishing House

Location

Petrosani

Pages from

33

Pages to

40

Pages count

8

URL

BibTex


@article{BUT157328,
  author="Pavla {Šabacká} and Jiří {Maxa}",
  title="FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING",
  annote="The paper deals with the effect of the critical flow, which is reached during
pumping of the differential pumping chamber of the Environmental Scanning Electron
Microscope (ESEM). The study compares the state of the flow in the area of pumped chamber
at pressure ratio on the apertures when the critical flow occurs and its advantages in design of
the chambers versus the flow without the clogging the nozzle. The problem was solved using
the finite volume method by the Ansys Fluent system.",
  address="Universitas Publishing House",
  chapter="157328",
  howpublished="online",
  institution="Universitas Publishing House",
  number="1",
  volume="20",
  year="2019",
  month="january",
  pages="33--40",
  publisher="Universitas Publishing House",
  type="journal article"
}