Publication detail

Correlating structural and mechanical properties of AlN/TiN superlattice films

KOUTNÁ, N. ŘEHÁK, P. CHEN, Z. BARTOSIK, M. FALLMANN, M. ČERNÝ, M. ZHANG, Z. FRIÁK, M. ŠOB, M. MAYRHOFER, P.H. HOLEC, D.

Original Title

Correlating structural and mechanical properties of AlN/TiN superlattice films

Type

journal article in Web of Science

Language

English

Original Abstract

Combining first-principles and experimental techniques, we establish Young’s modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice— providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.

Keywords

transition metal nitrides; superlattices; microstructural design; elastic moduli; cleavage energy

Authors

KOUTNÁ, N.; ŘEHÁK, P.; CHEN, Z.; BARTOSIK, M.; FALLMANN, M.; ČERNÝ, M.; ZHANG, Z.; FRIÁK, M.; ŠOB, M.; MAYRHOFER, P.H.; HOLEC, D.

Released

1. 5. 2019

ISBN

1359-6462

Periodical

SCRIPTA MATERIALIA

Year of study

165

Number

3

State

United States of America

Pages from

159

Pages to

163

Pages count

5

BibTex

@article{BUT155625,
  author="KOUTNÁ, N. and ŘEHÁK, P. and CHEN, Z. and BARTOSIK, M. and FALLMANN, M. and ČERNÝ, M. and ZHANG, Z. and FRIÁK, M. and ŠOB, M. and MAYRHOFER, P.H. and HOLEC, D.",
  title="Correlating structural and mechanical properties of AlN/TiN superlattice films",
  journal="SCRIPTA MATERIALIA",
  year="2019",
  volume="165",
  number="3",
  pages="159--163",
  doi="10.1016/j.scriptamat.2019.02.021",
  issn="1359-6462"
}