Publication detail

MEMS Microhotplates for Chemical Sensors

PRÁŠEK, J. VANČÍK, S. SVATOŠ, V. KLEMPA, J. GABLECH, I. PYTLÍČEK, Z. LEVEK, V.

Original Title

MEMS Microhotplates for Chemical Sensors

English Title

MEMS Microhotplates for Chemical Sensors

Type

conference paper

Language

en

Original Abstract

In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.

English abstract

In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.

Keywords

microhotplate; MEMS; micromachining; gas sensor

Released

21.08.2018

Publisher

IEEE Computer Society

Location

Serbia

ISBN

9781538657317

Book

41st International Spring Seminar on Electronics Technology ISSE2018

Pages from

1

Pages to

5

Pages count

5

Documents

BibTex


@inproceedings{BUT150735,
  author="Jan {Prášek} and Silvester {Vančík} and Vojtěch {Svatoš} and Jaroslav {Klempa} and Imrich {Gablech} and Zdeněk {Pytlíček} and Vladimír {Levek}",
  title="MEMS Microhotplates for Chemical Sensors",
  annote="In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.",
  address="IEEE Computer Society",
  booktitle="41st International Spring Seminar on Electronics Technology ISSE2018",
  chapter="150735",
  doi="10.1109/ISSE.2018.8443768",
  howpublished="electronic, physical medium",
  institution="IEEE Computer Society",
  year="2018",
  month="august",
  pages="1--5",
  publisher="IEEE Computer Society",
  type="conference paper"
}