Publication detail

Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre

MAXA, J. HLAVATÁ, P. VYROUBAL, P.

Original Title

Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre

Type

conference paper

Language

English

Original Abstract

This article comes out from the series of articles devoted to the issue of pumping in the differentially pumped chamber. This article is based on a study of Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistic method. To solve the problem, we use the mechanics of continuum with experimental verification. The article deals with a construction of the conic tip of the static probe.

Keywords

Environmental scanning electron microscope (ESEM), ANSYS Fluent, finite volume method, Differentially pumped chamber, Taylor – Maccoll theory.

Authors

MAXA, J.; HLAVATÁ, P.; VYROUBAL, P.

Released

20. 10. 2018

ISBN

978-80-214-5109-4

Book

ECS Transactions

ISBN

1938-5862

Periodical

ECS Transactions

Number

1

State

United States of America

Pages from

377

Pages to

387

Pages count

11

URL

https://iopscience.iop.org/article/10.1149/08701.0377ecst

BibTex

@inproceedings{BUT150573,
  author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}",
  title="Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre",
  booktitle="ECS Transactions",
  year="2018",
  journal="ECS Transactions",
  number="1",
  pages="377--387",
  doi="10.1149/08701.0377ecst",
  isbn="978-80-214-5109-4",
  issn="1938-5862",
  url="https://iopscience.iop.org/article/10.1149/08701.0377ecst"
}